Back to results
US 2024/0192067 A1Published application
Strain gauge
AssigneeCommissariat à I'Énergie Atomique et aux Énergies Alternatives
InventorsGuillaume Jourdan, Marc Gely
Life of this patent
Estimating the term…
Abstract
A device including a substrate; a first layer resting on the substrate, the first layer including a first portion and a second portion mobile with respect to each other; and a ring-shaped optical resonator defined in a second layer. The resonator includes a first portion fixed to a first anchor pad connected to the first portion of the first layer and a second portion fixed to a second anchor pad connected to the second portion of the first layer.
Claims15
Device comprising:
- a substrate;
- a first layer resting on the substrate, the first layer comprising a first portion and a second portion mobile with respect to each other;
- a ring-shaped optical resonator defined in a second layer, the resonator comprising a first portion fixed to a first anchor pad connected to the first portion of the first layer and a second portion fixed to a second anchor pad connected to the second portion of the first layer.
Dependencies are inferred from the claim text.