Multi-axis force sensor

Abstract

A force sensor includes: a substrate that forms a three-dimensional, 3D, body disposed about a central z-axis of an r, θ, z-cylindrical coordinate system, the 3D body having a first surface, an second surface, and a sidewall disposed between the first and second surfaces, wherein the sidewall at least partially encloses a void in the 3D body that extends from and through the first surface to and through the second surface; an electrical circuit disposed on either one of the first surface or the second surface, the electrical circuit having at least one strain gauge, and a plurality of electrical terminals electrically connected to the at least one strain gauge; wherein the sidewall includes at least one strain focusing feature; wherein the at least one strain gauge is disposed proximate to the at least one strain focusing feature.

Dependencies are inferred from the claim text.