Flow rate measurement device
AssigneeMurata Machinery, Ltd.
InventorsYasuhisa Ito, Shinji Onishi
Life of this patent
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Abstract
A flow rate measurement device measures the flow rate of purge gas in a purge device configured to supply the purge gas to a container including a bottom lid configured to be attached to and detached from a container body. The flow rate measurement device includes: a base on which a flow-rate measurer is mounted; an engaged part provided in the base and configured to be engaged with the bottom lid; and a flow passage through which the purge gas injected from an injection port of the bottom lid is circulated to the flow-rate measurer when the engaged part is engaged with the bottom lid.
Claims9
1-8. (canceled)
A flow rate measurement device configured to measure a flow rate of purge gas in a purge device configured to supply the purge gas to a container including a bottom lid configured to be attached to and detached from a container body, the flow rate measurement device comprising:
- a base on which a flow-rate measurer is mounted;
- an engaged part provided in the base and configured to be engaged with the bottom lid;
- and
- a flow passage through which the purge gas injected from an injection port of the bottom lid is circulated to the flow-rate measurer when the engaged part is engaged with the bottom lid.
The flow rate measurement device according to claim 2, wherein
- the bottom lid includes a latch and is attached to the container body with the latch, and
- the engaged part is engaged with the latch.
Dependencies are inferred from the claim text.