Semiconductor manufacturing chemical compound monitoring process
AssigneeASM IP Holding B.V.
InventorsPanagiota Arnou, Tom Van Kesteren, Mehmet Orhan Tas, Gido Van Der Star
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Abstract
In general the various aspects of the technology of the present disclosure relate to semiconductor processing, and particularly to monitoring the amount of chemicals consumed by a semiconductor manufacturing process.
Claims22
A semiconductor manufacturing system comprising:
- chemical compound flow sensor for measuring the flow of a chemical compound through a process line fluidically connecting a storage vessel for said chemical compound to a process chamber;
- and
- a controller configured to monitor the consumption of one or more chemical compounds in said semiconductor manufacturing system, said controller being configured to receive chemical compound flow data from said chemical compound flow sensor and determine, from said data, the amount of chemical compound consumed by said semiconductor manufacturing system.
A method for monitoring consumption of chemical compounds in a semiconductor manufacturing process, the method comprising the steps of:
- measuring the flow of a chemical compound through a process line fluidically connecting a storage vessel for said chemical compound to a process chamber;
- and
- determining from said measurement the amount of said chemical compound consumed by said semiconductor manufacturing process.
A method performed by one or more computers for monitoring the consumption of chemical compounds in a semiconductor manufacturing process, comprising the steps of:
- receiving data related to flow of a chemical compound through a process line fluidically connecting a storage vessel to a process chamber;
- and
- determining, from said data, the amount of said chemical compound consumed by the semiconductor manufacturing process.
A system for monitoring the consumption of chemical compounds in a semiconductor manufacturing process comprising a controller configured to receive data related to the chemical compound flow through a process line fluidically connecting a storage vessel to a process chamber and determine, from said data, the amount of chemical compound consumed by the semiconductor manufacturing process.
One or more non-transitory computer readable media encoded with a computer program, the computer program comprising instructions that, when executed by one or more computers, cause the one or more computers to perform operations for determining the amount of chemical compound consumed by a semiconductor manufacturing process when provided with data related to the flow of said chemical compound through a process line fluidically connecting a storage vessel to a process chamber as input.
Dependencies are inferred from the claim text.