Gas treatment system
AssigneeEdwards Japan Limited
InventorsJinquan Guan, Masahiro Tanaka, Mitsunori Abe
Life of this patent
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AssigneeEdwards Japan Limited
InventorsJinquan Guan, Masahiro Tanaka, Mitsunori Abe
Estimating the term…
A gas treatment system includes: a main exhaust line for guiding exhaust gas to a detoxification apparatus; a bypass line for guiding the exhaust gas to an emergency detoxification apparatus; an upstream exhaust line; and a three-way valve capable of switching a flow of the exhaust gas from the upstream exhaust line to the main exhaust line or the bypass line, in which the bypass line includes: a gate valve; a gas introduction pipe through which a second gas is introduced; and a pressure gauge configured to detect pressure. When the three-way valve discharges gas to the main exhaust line, in a state where the second gas has been introduced into a closed flow path C between the gate valve and the three-way valve from the gas introduction pipe, internal leakage in the three-way valve is detectable using change in the pressure detected by the pressure gauge.
A gas treatment system comprising:
Dependencies are inferred from the claim text.