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US 2024/0191394 A1Published application
Bonded substrate composed of support substrate and group-13 element nitride crystal substrate
AssigneeNGK Insulators, Ltd.
InventorsShuhei HIGASHIHARA, Masashi GOTO, Ayumi SAITO
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Abstract
It is provided a bonded substrate of a support substrate and group-13 nitride crystal substrate. The group-13 nitride crystal substrate comprises one or more transition metal elements selected from the group consisting of zinc, iron, manganese, nickel and chromium in a concentration of 1×1017 atoms·cm−3 or higher and 1×1021 atoms·cm−3 or lower.
Claims10
A bonded substrate comprising a support substrate and a 13-group nitride crystal substrate,
- wherein said group-13 nitride crystal substrate comprises one or more transition metal elements selected from the group consisting of zinc, iron, manganese, nickel and chromium in a concentration of 1×1017 atoms·cm−3 or higher and 1×1021 atoms·cm−3 or lower.
Dependencies are inferred from the claim text.