Device and Method for the User-Friendly and Reliable Galvanic Growth of a Plurality of Nanowires
OwnerOlav Birlem, Florian Dassinger +2inventors
InventorsOlav Birlem, Florian Dassinger, Sebastian Quednau, Farough Roustaie
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Abstract
Apparatus for galvanically growing a plurality of nanowires on a substrate, comprising a substrate holder and a housing, in which a chamber, a control unit and a storage tank for an electrolyte are arranged, the apparatus being designed to grow the plurality of nanowires from the electrolyte onto the substrate when the substrate holder with the substrate has been inserted into the chamber.
Claims20
Apparatus for galvanically growing a plurality of nanowires on a substrate, comprising a substrate holder and a housing, in which a chamber, a control unit and a storage tank for an electrolyte are arranged, the apparatus being designed to grow the plurality of nanowires from the electrolyte onto the substrate when the substrate holder with the substrate has been inserted into the chamber.
Method for galvanically growing a plurality of nanowires onto a substrate by an apparatus which has a substrate holder and a housing with a chamber, a control unit and a storage tank for an electrolyte, and the method comprising:
- a) placing the substrate into the substrate holder,
- b) inserting the substrate holder into the chamber,
- c) galvanically growing the nanowires from the electrolyte onto the substrate.
Dependencies are inferred from the claim text.