Shower head assembly and film forming apparatus
AssigneeTokyo Electron Limited
InventorsYuta SORITA, Takashi KAKEGAWA, Hiroo KAWASAKI
Life of this patent
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Abstract
A shower head assembly, which is disposed in a film forming apparatus that alternately repeats film formation and etching to form a metal film in a recess formed in a substrate, includes: a first plate having arc-shaped first slits formed in the first plate; and a second plate having arc-shaped second slits formed in the second plate, wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.
Claims18
A shower head assembly disposed in a film forming apparatus that alternately repeats film formation and etching to form a metal film in a recess formed in a substrate, the shower head assembly comprising:
- a first plate having arc-shaped first slits formed in the first plate;
- and
- a second plate having arc-shaped second slits formed in the second plate,
- wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.
A film forming apparatus comprising:
- a shower head assembly;
- and
- a control device that performs control to alternately repeat film formation and etching to form a metal film in a recess formed in a substrate,
- wherein the shower head assembly comprises:
- a first plate having arc-shaped first slits formed in the first plate;
- and
- a second plate having arc-shaped second slits formed in the second plate,
- wherein the second plate is disposed below the first plate to vertically overlap with the first plate, and the second slits are formed at locations such that the second slits do not overlap with the first slits in a plan view.
Dependencies are inferred from the claim text.