Deposition apparatus including mask assembly and shape correction method for mask assembly
AssigneeSamsung Display Co., Ltd.
InventorsWONYOUNG JANG, JONGDAE LEE, SOOHYUN MIN, Mina WOO, SEUNGJU HONG
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AssigneeSamsung Display Co., Ltd.
InventorsWONYOUNG JANG, JONGDAE LEE, SOOHYUN MIN, Mina WOO, SEUNGJU HONG
Estimating the term…
A deposition apparatus includes: a chamber; a stage defining a stage-opening therein and disposed inside the chamber; a frame disposed on the stage and defining a frame-opening therein corresponding to the stage-opening; a mask coupled to the frame and defining a plurality of deposition openings therein corresponding to the frame-opening; a deposition source configured to spray a deposition material to the frame-opening; alignment units coupled to the stage and contacting the frame to move a position of the frame on the stage; and correction units each of which includes a magnetic force part disposed on the stage and adjacent to the frame, and a driving part configured to provide a magnetic force to the magnetic force part, wherein the correction units are configured to change a shape of the frame, and are coupled to the stage.
A deposition apparatus comprising:
A mask assembly comprising:
A shape correction method for a mask assembly, comprising:
Dependencies are inferred from the claim text.