Apparatus for producing aln whiskers
AssigneeNational University Corporation Nagoya University
InventorsToru Ujihara, Yukihisa Takeuchi, Daishi Shiojiri, Masaki Matsumoto, Hiroshi Saito
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Abstract
A method and apparatus for producing AlN whiskers includes reduced incorporation of metal particles, an AlN whisker body, AlN whiskers, a resin molded body, and a method for producing the resin molded body. The method for producing AlN whiskers includes heating an Al-containing material in a material accommodation unit to thereby generate Al gas; and introducing the Al gas into a reaction chamber through a communication portion while introducing nitrogen gas into the reaction chamber through a gas inlet port, to thereby grow AlN whiskers on the surface of an Al2O3 substrate placed in the reaction chamber.
Claims7
An apparatus for producing AlN whiskers, characterized in that the apparatus comprises a material accommodation unit for accommodating an Al-containing material;
- a reaction chamber for growing AlN whiskers;
- and
- a first heating unit for heating at least the material accommodation unit, wherein the reaction chamber comprises one or more species of insulating substrates;
- the first heating unit heats the Al-containing material accommodated in the material accommodation unit;
- and
- the production apparatus comprises one or more communication portions that communicate between the material accommodation unit and the reaction chamber.
Dependencies are inferred from the claim text.