Molybdenum precursors and related methods

A method comprising:

• obtaining a precursor vessel comprising a MoCl5 precursor and a headspace vapor;
• removing the headspace vapor from the precursor vessel;
• heating the precursor vessel to a target temperature;
• measuring a total pressure within the precursor vessel to obtain a measured total pressure;
• comparing the measured total pressure to a reference value to validate or not validate a low impurity content of the MoCl5 precursor,
• wherein, when the measured total pressure is within 1% to 10% of a true vapor pressure of MoCl5, the low impurity content of the MoCl5 precursor is validated;
• wherein, when the measured total pressure is not within 1% to 10% of the true vapor pressure of MoCl5, the low impurity content of the MoCl5 precursor is not validated.

A method comprising:

• obtaining a precursor vessel comprising a MoCl5 precursor and a headspace vapor;
• removing the headspace vapor from the precursor vessel;
• heating the precursor vessel to a target temperature;
• measuring a rate of change of total pressure within the precursor vessel to obtain a measured rate of change of total pressure;
• comparing the measured rate of change of total pressure to a reference value to validate or not validate a low impurity content of the MoCl5 precursor,
• wherein, when the rate of change of total pressure is greater than the reference value, the low impurity content of the MoCl5 precursor is not validated;
• wherein, when the rate of change of total pressure is equal to or less than the reference value, the low impurity content of the MoCl5 precursor is validated.