Semiconductor device and method of manufacturing semiconductor device

An electronic device, comprising:

• a base substrate comprising:
• a substrate top side;
• a substrate bottom side opposite to the substrate top side;
• a passageway extending through the base substrate from the substrate top side to the substrate bottom side;
• and
• a first conductive structure;
• a sensor device comprising:
• a sensor top side;
• a sensor bottom side opposite to the sensor top side;
• and
• a cavity extending partially inward from the sensor bottom side;
• a barrier fixed to the sensor bottom side and extending across the cavity;
• and
• a cover structure comprising a cover wall, a side wall coupled to the cover wall and the substrate top side, a second conductive structure associated with the cover wall;
• wherein:
• the second conductive structure is coupled to the first conductive structure;
• the sensor device is coupled to the first conductive structure;
• the barrier comprises first barrier strand structures defining first barrier through-holes;
• and
• the barrier is attached to the substrate top side so that the first barrier through-holes overlie the passageway and the barrier is interposed between the sensor bottom side and the substrate top side.

An electronic device, comprising:

• a first electronic device comprising a first surface and a second surface opposite to the first surface, and a cavity extending partially inward from the second surface to provide a diaphragm adjacent to the first surface;
• and
• a barrier coupled to the second surface of the first electronic device, wherein the barrier extends across the cavity and comprises:
• a first membrane including:
• a first barrier body;
• and
• first barrier strands bounded by the first barrier body and defining first through-holes;
• and
• one or more of:
• second barrier strands on the first barrier strands and defining second through-holes that are laterally offset from the first through-holes;
• or
• a conformal membrane layer over the first barrier strands.