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US 2024/0190698 A1Published application
Stopper bump on rotor
AssigneeMurata Manufacturing Co., Ltd.
InventorsMatti LIUKKU, Pekka LEHTINEN
Life of this patent
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Abstract
A microelectromechanical element is provided that includes a motion-limiting structure that prevents a main rotor body from coming into direct physical contact with a stator across a vertical rotor-stator gap. The motion-limiting structure includes a first stopper bump that is a protrusion on the stator that extends towards the rotor. The motion-limiting structure also includes a second stopper bump that is a protrusion on the rotor that extends from the main rotor body towards the stator.
Claims20
A microelectromechanical element comprising:
- a mobile rotor that includes a main rotor body and is in a device layer that defines an xy-plane and a z-direction that is perpendicular to the xy-plane;
- a fixed stator that is adjacent to the mobile rotor and that is separated from the mobile rotor in the z-direction by a rotor-stator gap;
- and
- a motion-limiting structure that is configured to prevent the main rotor body from directly contacting the fixed stator across the rotor-stator gap, the motion-limiting structure including:
- a first stopper bump that is a protrusion on the fixed stator that extends towards the mobile rotor, and
- a second stopper bump that is a protrusion on the mobile rotor that extends from the main rotor body towards the fixed stator.
3 more elements
A microelectromechanical element comprising:
- a mobile rotor that includes a main rotor body and is in a device layer;
- a fixed stator that is separated from the mobile rotor by a rotor-stator gap;
- and
- a motion-limiting structure that is configured to prevent the main rotor body from directly contacting the fixed stator across the rotor-stator gap, the motion-limiting structure including:
- a first stopper bump that is a protrusion on the fixed stator that extends towards the mobile rotor, and
- a second stopper bump that is a protrusion on the mobile rotor that extends from the main rotor body towards the fixed stator.
3 more elements
Dependencies are inferred from the claim text.