Actuator device
AssigneeHamamatsu Photonics K.K.
InventorsDaiki SUZUKI, Takuma OSAKI, Naoto SAKURAI
Life of this patent
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Abstract
An actuator device includes a support part, a first movable part, and a second movable part. The second movable part includes a pair of first connection portions positioned on both sides of the first movable part on a first axis and connected to a pair of first connecting parts, a pair of second connection portions positioned on both sides of the first movable part on a second axis and connected to a pair of second connecting parts. An outer edge of the second connection portions includes a protrusion portion protruding in a second axis direction. The outer edge of the protrusion portion includes a linear portion extending in a first axis direction and a pair of curved portions positioned on both ends of the linear portion.
Claims20
An actuator device comprising:
- a support part;
- a first movable part;
- a second movable part formed in a frame shape and arranged so as to surround the first movable part;
- a pair of first connecting parts arranged on both sides of the first movable part in a first axis direction parallel to a first axis and connecting the first movable part to the second movable part so that the first movable part can swing around the first axis;
- and
- a pair of second connecting parts arranged on both sides of the second movable part in a second axis direction parallel to a second axis orthogonal to the first axis and connecting the second movable part to the support part so that the second movable part can swing around the second axis,
- wherein the second movable part includes a pair of first connection portions positioned on both sides of the first movable part on the first axis and connected to the pair of first connecting parts, and a pair of second connection portions positioned on both sides of the first movable part on the second axis and connected to the pair of second connecting parts,
- an outer edge of each of the pair of second connection portions, when viewed in a direction orthogonal to the first and second axes, includes a protrusion portion protruding in the second axis direction, and
- the outer edge of the protrusion portion includes a linear portion extending in the first axis direction and a pair of curved portions positioned on both ends of the linear portion.
Dependencies are inferred from the claim text.