Transfer robot system and the transfer robot system driving method

The transfer robot system comprising:

• an autonomous driving apparatus which transfers an article to semiconductor manufacturing facilities by autonomously driving within a space at which the semiconductor manufacturing facilities are installed, which collects a state information of a semiconductor manufacturing facility, and which is configured of at least one among an OHT and a mobile robot;
• and
• a state monitoring unit connected with the autonomous driving apparatus to continuously be input with the state information of the semiconductor manufacturing facilities and for monitoring a change value of the state information, and
• wherein the transfer robot system further comprises a proximity sensor which generates a facility scan information a shape of the semiconductor manufacturing facility into the state information;
• a camera sensor which generates a facility image information of an image of the semiconductor manufacturing facility into the state information;
• a sound detection sensor which generates a facility sound information of a sound of the semiconductor manufacturing facility into the state information;
• a vibration detection sensor which generates a facility vibration information of a sound of the semiconductor manufacturing facility into the state information;
• and a temperature detection sensor which generates a facility temperature information of a temperature of the semiconductor manufacturing facility into the state information, and
• wherein the transfer robot system further comprises an inspection information storage unit which stores a facility name of the semiconductor manufacturing facility and an inspection time every set cycle, together with the state information;
• an abnormality detection unit for determining whether the state information has a change from a pre-stored value, if the state information is input in communication with the inspection information storage unit;
• and a facility life prediction unit for monitoring how much a change rate of a intensity or a range of the state information increases during a predetermined period, in communication with the abnormality detection unit.