Systems and methods to detect rotation of a vibratory polisher
AssigneeIllinois Tool Works Inc.
InventorsDouglas A. Ceckowski, Timothy P. Weber, Heber I. Castanon
Life of this patent
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Abstract
Example systems and methods for detecting movement of a sample subject to a polishing operation in a vibratory polisher. The system includes a sample holder to secure the sample to be polished. A housing supports a platen upon which the sample holder is placed. The platen allows for movement of the sample holder during a polishing operation as the sample holder traverses a polishing fluid distributed about the platen. One or more sensors are arranged about the housing, operable to monitor movement of the sample holder on the platen relative to the housing.
Claims20
A system to perform a polishing operation on a sample, comprising:
- a sample holder to secure a sample to be polished;
- a housing to support a platen, the platen operable to allow movement of the sample holder during a polishing operation;
- and
- one or more sensors to monitor movement of the sample holder relative to the housing.
A system to perform a polishing operation on a sample, comprising:
- a sample holder to secure a sample to be polished;
- a bowl to vibrate the sample holder;
- and
- one or more sensors to monitor movement of the sample holders relative to the bowl.
A system to perform a polishing operation on a sample, comprising:
- a sample to be polished;
- a housing to support a platen, the platen operable to allow movement of the sample during a polishing operation;
- and
- one or more sensors to monitor movement of the sample relative to the housing.
Dependencies are inferred from the claim text.