Transversely-excited film bulk acoustic resonator with periodic etched holes
AssigneeMurata Manufacturing Co., Ltd.
InventorVentsislav YANTCHEV
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Abstract
There are disclosed acoustic resonators and method of fabricating acoustic resonators. An acoustic resonator includes a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to a surface of a substrate except for portions of the piezoelectric plate forming a diaphragm spanning a cavity in the substrate. A conductor pattern on the front surface includes an interdigital transducer (IDT) with interleaved fingers of the IDT disposed on the diaphragm. A periodic array of holes is provided in the diaphragm.
Claims20
An acoustic resonator, comprising:
- a substrate;
- a dielectric layer disposed on the substrate and having a cavity disposed therein;
- a piezoelectric layer disposed above the dielectric layer and including a diaphragm over the cavity in the dielectric layer;
- a conductor pattern at the piezoelectric layer and including an interdigital transducer (IDT) having a plurality of interleaved fingers on the diaphragm;
- and
- at least one hole extending in the diaphragm at an end of at least one finger of the plurality of interleaved fingers of the IDT.
An acoustic resonator, comprising:
- a piezoelectric layer;
- a conductor pattern at the piezoelectric layer and including an interdigital transducer (IDT) having a plurality of interleaved fingers thereon;
- and
- at least one hole extending in the diaphragm at an end of at least one finger of the plurality of interleaved fingers of the IDT.
A filter device comprising:
- a plurality of acoustic resonators, with at least one of the plurality of acoustic resonators comprising:
- a substrate,
- a piezoelectric layer attached to the substrate either directly or via one or more intermediate layers and including a diaphragm over a cavity,
- a conductor pattern at the piezoelectric layer and including an interdigital transducer (IDT) having a plurality of interleaved fingers on the diaphragm, and
- at least one hole extending in the diaphragm at an end of at least one finger of the plurality of interleaved fingers of the IDT.
Dependencies are inferred from the claim text.