Apparatus and method for inspecting wafer carriers
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsCheng-Kang HU, Shou-Wen KUO, Sheng-Hsiang CHUANG, Jiun-Rong PAI, Hsu-Shui LIU
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Abstract
An apparatus for inspecting wafer carriers is disclosed. In one example, the apparatus includes: a housing; a load port; a robot arm inside the housing; and a processor. The load port is configured to load a wafer carrier into the housing. The robot arm is configured to move a first camera connected to the robot arm. The first camera is configured to capture a plurality of images of the wafer carrier. The processor is configured to process the plurality of images to inspect the wafer carrier.
Claims20
An apparatus for inspecting a wafer carrier, comprising:
- a housing configured to receive a wafer carrier;
- a robot arm inside the housing, wherein the robot arm is configured to move a first camera connected to the robot arm, wherein the first camera is configured to capture at least one image of the wafer carrier;
- and
- a processor configured to process the at least one image to inspect the wafer carrier.
A method for inspecting wafer carriers, comprising:
- receiving a wafer carrier;
- capturing at least one image of the wafer carrier by a first camera that is moved by a robot arm;
- and
- processing the at least one image to inspect the wafer carrier.
A system for inspecting wafer carriers, comprising:
- an overhead transport tool configured to transport a wafer carrier;
- and
- an inspection device that comprises:
- a housing configured to receive a wafer carrier;
- a robot arm inside the housing, wherein the robot arm is configured to move a first camera connected to the robot arm, wherein the first camera is configured to capture at least one image of the wafer carrier;
- and
- a processor configured to process the at least one image to inspect the wafer carrier.
Dependencies are inferred from the claim text.