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US 2024/0186104 A1Published application
Method and apparatus for an imaging system
OwnerFrederick A. Flitschinventor
Life of this patent
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Abstract
The present invention provides apparatus for an imaging system including artificial intelligence algorithmic processing components. Imaging systems may include elements that emit electrons, photons or molecules in different examples. Artificial intelligence algorithms may be used to optimize operating parameters of the imaging systems through use of training databases and feedback of metrology obtained during processing.
Claims20
An imaging apparatus comprising:
- a first apparatus comprising a first substrate with a multitude of imaging elements arrayed thereupon, wherein the imaging elements are capable of emitting an imaging signal from their structure to a material sensitive to their emissions on a second surface in a vicinity of the first apparatus,
- the second surface to be processed by the imaging apparatus;
- an alignment feature and alignment apparatus to measure the alignment feature;
- a processor, comprising artificial intelligence algorithms, operant to collect data from imaging apparatus components, process the data and control imaging apparatus components based on the data.
1 more element
A method of forming an imaging system comprising:
- forming an individual imaging system element;
- testing the individual imaging system element;
- selecting the individual imaging system element based on compliance to desired specifications;
- forming a receiving substrate with electrical interconnect features thereon;
- placing selected individual imaging system elements upon the receiving substrate;
- and
- processing the placed selected individual imaging elements to electrically connect them upon the receiving substrate;
- testing the imaging system to form test structures;
- measuring the test structures;
- calculating correction values utilizing result of the measuring;
- training an artificial intelligence algorithm utilizing the test structure measuring and correction value experience.
8 more elements
A method of forming a product comprising:
- obtaining an imaging apparatus comprising:
- a first apparatus comprising a first substrate with a multitude of imaging elements arrayed thereupon, wherein the imaging elements are capable of emitting an imaging signal from their structure to a material sensitive to their emissions on a second surface in a vicinity of the first apparatus,
- the second surface to be processed by the imaging apparatus;
- an alignment feature and alignment apparatus to measure the alignment feature;
- a processor, comprising an artificial intelligence integrated circuit comprising artificial intelligence algorithms, operant to collect data from imaging apparatus components, process the data and control imaging apparatus components based on the data;
- processing a substrate with the imaging apparatus;
- measuring a result of the processing of the substrate with the imaging apparatus;
- training the artificial intelligence algorithms with the measurement result;
- and
- processing a second substrate with the imaging apparatus as a part of processing steps to form a product.
7 more elements
Dependencies are inferred from the claim text.