Late middle-of-line gate cut with power bar formation
AssigneeInternational Business Machines Corporation
InventorsShravana Kumar Katakam, Tao Li, Indira Seshadri, Ruilong Xie
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AssigneeInternational Business Machines Corporation
InventorsShravana Kumar Katakam, Tao Li, Indira Seshadri, Ruilong Xie
Estimating the term…
According to the embodiment of the present invention, a semiconductor device includes a first nanodevice comprised of a plurality of first transistors and a second nanodevice comprised of a plurality of second transistors. The first nanodevice includes a first source/drain contact. The second nanodevice includes a second source/drain contact. The second nanodevice is located adjacent to and parallel to the first nanodevice. A power bar is located between the first nanodevice and the second nanodevice. The power bar is connected to the second source/drain contact. A top surface of the power bar and the second source/drain contact are substantially in a same plane. The top surface of the power bar and the second source/drain contact are substantially a same height.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A method of making a semiconductor device, the method comprising:
Dependencies are inferred from the claim text.