Local interconnect formation at double diffusion break
AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Min Gyu Sung, Julien Frougier, Chanro Park, Kangguo Cheng
Life of this patent
Estimating the term…
Loading patent…
AssigneeInternational Business Machines Corporation
InventorsRuilong Xie, Min Gyu Sung, Julien Frougier, Chanro Park, Kangguo Cheng
Estimating the term…
A microelectronic structure including a first nano device that includes a plurality of first transistors and a second nano device that includes a plurality of second transistors. The first nano device and the second nano device are parallel to each other. A doubled diffusion break that extends across the first nano device and the second nano device. A back-end-of-the-line (BEOL) layer located on a frontside of the first nano device and the second nano device. A backside interconnect located on a backside of the first nano device and the second nano device and the BEOL layer is connected to the backside interconnect through the double diffusion break.
A microelectronic structure comprising:
A microelectronic structure comprising:
A microelectronic structure comprising:
Dependencies are inferred from the claim text.