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US 2024/0178052 A1Published application
Replacement material for backside gate cut feature
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWang-Chun HUANG, Yu-Xuan HUANG, Hou-Yu CHEN, Chih-Hao WANG, Kuan-Lun CHENG
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Abstract
A semiconductor structure includes a substrate, a first gate structure and a second gate structure disposed over the substrate, and an isolation feature extending through the substrate and disposed between the first gate structure and the second gate structure. A top surface of the isolation feature is above a topmost surface of the first gate structure.
Claims20
A semiconductor structure comprising:
- a substrate;
- a first gate structure and a second gate structure disposed over the substrate;
- and
- an isolation feature extending through the substrate and disposed between the first gate structure and the second gate structure,
- wherein a top surface of the isolation feature is above a topmost surface of the first gate structure.
2 more elements
A semiconductor structure comprising:
- a gate structure surrounding a plurality of channel layers, wherein the gate structure includes a first work-function layer wrapping around the plurality of channel layers and a gate electrode disposed over the first work-function layer;
- an isolation feature separating the gate structure into two portions and electrically isolating the two portions, wherein the isolation feature comprises a portion below a bottommost surface of the gate structure;
- and
- a second work-function layer disposed between the gate structure and the isolation feature, wherein a portion of the second work-function layer is disposed on a top portion of a sidewall of the portion of the isolation feature.
1 more element
A semiconductor structure comprising:
- a gate structure surrounding a plurality of channel layers;
- a dielectric layer disposed over the gate structure;
- an isolation feature extending through the gate structure and into the dielectric layer, wherein the isolation feature separates the gate structure into two portions;
- and
- a work-function layer disposed between the isolation feature and the gate structure and in direct contact with the isolation feature.
2 more elements
Dependencies are inferred from the claim text.