Robot for handling flat substrates as well as alignment facility
OwnerUwe BEIERinventor
Life of this patent
Estimating the term…
Abstract
A robot for handling flat substrates having one or more substrate holder(s), each substrate holder is for horizontally holding respectively one of the substrates, a carrier block holding the substrate holder or if several substrate holders are provided holding the substrate holders spaced from each other, and a robot arm. The carrier block is attached to the robot arm by an alignment facility, and the alignment facility is for aligning the carrier block.
Claims16
1-15. (canceled)
A robot for handling flat substrates, comprising:
- one or more substrate holder(s) wherein each substrate holder is for horizontally holding respectively one of the substrates,
- a carrier block holding the substrate holder or if several substrate holders are provided holding the substrate holders spaced from each other, and
- a robot arm;
- wherein the carrier block is attached to the robot arm by an alignment facility, wherein the alignment facility is for aligning the carrier block.
An alignment facility for aligning a carrier block that holds one or more substrate holders spaced from each other, wherein each of the substrate holders each is for horizontally holding a flat substrate, characterized in that the alignment facility has a connecting element with a first leg and a second leg that are spaced from each other to form a gap, wherein the alignment facility further has at least one adjusting element for adjusting the distance between the first and the second leg.
Dependencies are inferred from the claim text.