Substrate transfer robot system and teaching method for substrate transfer robot

A teaching method for a substrate transfer robot performed by a substrate transfer robot system that teaches a transfer position of a substrate to the substrate transfer robot that transfers the substrate,

• wherein the substrate transfer robot includes:
• a hand configured to transfer the substrate;
• a mover configured to move the hand in a horizontal direction and in a vertical direction;
• first and second sensors provided on the hand and configured to radiate a scanning line in the horizontal direction and in the vertical direction, respectively, and
• wherein the substrate transfer robot system comprises:
• a controller configured to control the hand and the mover;
• and
• a first portion to be detected and a second portion to be detected of which positions from a transfer position and positions from each other are known, the first and second portions being provided at the transfer position,
• the teaching method comprising:
• operating the hand to detect the first portion by the first and second sensors and detect the second portion by the second sensor, and
• calculating and storing the transfer position based on position information of the hand when the first and second portions are detected.