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US 2024/0178041 A1Published application
Resin member and dividing apparatus
AssigneeDisco Corporation
InventorAyumu SAKAI
Life of this patent
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Abstract
A resin member for supporting a workpiece has urethane linkages deriving from a reaction between a polyether polyol and an aliphatic isocyanate. Note that, preferably, the resin member has transmittance of not less than 74.88 for light of a wavelength of 550 nm. In addition, preferably, the resin member has Shore A hardness of 50 to 90.
Claims8
A resin member for supporting a workpiece,
- wherein the resin member has urethane linkages deriving from a reaction between a polyether polyol and an aliphatic isocyanate.
A dividing apparatus that divides a workpiece formed with division start points along streets, along the streets, the dividing apparatus comprising:
- a resin member that supports the workpiece;
- a pressing member that presses the workpiece supported by the resin member;
- and
- an imaging unit that images the workpiece through the resin member,
- wherein the resin member has urethane linkages deriving from a reaction between a polyether polyol and an aliphatic isocyanate.
2 more elements
Dependencies are inferred from the claim text.