Loading and unloading system for silicon wafer
AssigneeLaplace (Wuxi) Semiconductor Technology Co., Ltd.
InventorsJiaji Lin, Huan Zhou, Xiang Shi
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AssigneeLaplace (Wuxi) Semiconductor Technology Co., Ltd.
InventorsJiaji Lin, Huan Zhou, Xiang Shi
Estimating the term…
A loading and unloading system for silicon wafer includes a wafer guiding apparatus, a silicon wafer flipping apparatus, and a conveying apparatus. The wafer guiding apparatus includes a loading-guiding assembly, an unloading-guiding assembly, and a lateral conveying device connecting each of the loading-guiding assembly and the unloading-guiding assembly. The loading-guiding assembly controls loading of silicon wafers, the unloading-guiding assembly controls unloading of the silicon wafers. The silicon wafer flipping apparatus includes a silicon wafer flipping mechanism, a silicon wafer lateral moving mechanism, and a silicon wafer shift mechanism configured to control movement of the silicon wafer flipping mechanism, the silicon wafer flipping mechanism configured to flip the silicon wafers. The conveying apparatus is configured to control flowing of silicon wafers between a main apparatus and the silicon wafer flipping apparatus.
A loading and unloading system for silicon wafer, comprising:
Dependencies are inferred from the claim text.