Substrate processing apparatus and substrate processing method

A substrate processing apparatus comprising:

• a processing container having a processing space;
• a substrate support configured to support a substrate in the processing container;
• a fluid supplier configured to supply a processing fluid in a supercritical state to the processing space through a container supply pipe;
• a shower head assembly configured to diffuse the processing fluid supplied from the fluid supplier into the processing space;
• a first laser portion configured to measure a horizontal alignment between the processing container and the shower head assembly;
• a second laser portion configured to measure a vertical alignment between the processing container and the shower head assembly;
• a jig configured to be positioned between the substrate and the first or second laser portions when the substrate is disposed on the substrate support;
• and
• a gyro sensor configured to be mounted on the jig and configured to measure an inclination of the substrate or a lower body of the processing container,
• wherein each of the first laser portion and the second laser portion is configured to emit laser beams toward one of the processing container and the shower head assembly at at least three different points on the jig.

A substrate processing method comprising:

• mounting a gyro sensor on a jig;
• measuring an inclination of a substrate and an inclination of a lower body of a processing container by using the gyro sensor;
• correcting a position of the substrate and a position of the lower body, based on the measured inclination of the lower body;
• mounting a first laser portion on the jig;
• measuring a horizontal width between an upper body of the processing container and a shower head assembly by using the first laser portion;
• correcting a position of the shower head assembly, based on the horizontal width;
• mounting a second laser portion on the jig;
• measuring a vertical distance between a top surface of the second laser portion and one of the upper body of the processing container and the shower head assembly by using the second laser portion;
• and
• correcting a position of one of the upper body of the processing container and the shower head assembly, based on the vertical distance.