Substrate inspection system and method of use thereof

A substrate inspection system comprising:

• a film deposition apparatus comprising:
• a load lock chamber configured to receive and clamp a substrate, the load lock chamber comprising one or more viewport windows disposed to pass through a wall of the load lock chamber,
• a deposition chamber configured to deposit a film over the substrate to output a film-deposited substrate,
• a transfer robot configured to move the substrate and the film-deposited substrate between the load lock chamber and the deposition chamber, and
• one or more cameras coupled to an exterior portion of the one or more viewport windows of the load lock chamber and configured to capture at least one image of the substrate and/or the film-deposited substrate, disposed inside the load lock chamber, through the one or more viewport windows;
• a loading-unloading robot configured to load the substrate from an outside of the load lock chamber to an inside of the load lock chamber to place the substrate in the load lock chamber;
• the transfer robot configured to move the substrate from the load lock chamber to the deposition chamber;
• the deposition chamber configured to deposit a film over the substrate in the deposition chamber to output the film-deposited substrate;
• the transfer robot configured to move the film-deposited substrate from the deposition chamber to the load lock chamber to place the film-deposited substrate in the load lock chamber;
• the one or more cameras configured to capture at least one image of one or more portions of the film-deposited substrate such that the film is included in the at least one image, after the film-deposited substrate is placed in the load lock chamber;
• the loading-unloading robot configured to unload the film-deposited substrate from the load lock chamber;
• at least one controller configured to analyze the at least one image to determine whether a film deposited over the film-deposited substrate has a defect;
• and
• a display configured to display the at least one image and analysis results,
• the at least one controller further configured to:
• obtain contrast values of pixels in the at least one image;
• and
• process the contrast values to determine whether the film has a defect or an error.