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US 2024/0178014 A1Published application
Plasma etching chemistries of high aspect ratio features in dielectrics
AssigneeLam Research Corporation
InventorsKeren J. KANARIK, Samantha SiamHwa TAN, Yang PAN, Jeffrey MARKS
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Abstract
A method for etching features in a stack below a patterned mask in an etch chamber is provided. The stack is cooled with a coolant with a coolant temperature below −20° C. An etch gas is flowed into the etch chamber. A plasma is generated from the etch gas. Features are selectively etched into the stack with respect to the patterned mask.
Claims23
A method for etching comprising:
- a) supporting a substrate on a chuck in a chamber of a plasma treatment system, the substrate including a silicon-containing film, and the chuck having a lower electrode;
- b) cooling the substrate to a temperature below −20° ° C.;
- c) providing a halogen containing gas;
- d) providing a phosphorus containing gas;
- and
- e) generating a plasma from the halogen containing gas and the phosphorus containing gas wherein the plasma etches features in the silicon containing stack and deposits sidewall passivation on sidewalls of the features.
3 more elements
A method for etching comprising:
- a) supporting a substrate on a chuck in a chamber of a plasma treatment system, the substrate including a silicon-containing film, and the chuck having a lower electrode;
- b) providing a halogen containing gas;
- c) providing a phosphorus containing gas;
- and
- d) providing RF power to generate a plasma from the halogen containing gas and the phosphorus containing gas wherein the plasma etches features in the silicon containing stack and deposits sidewall passivation on sidewalls of the features.
2 more elements
Dependencies are inferred from the claim text.