Device and method for plasma generation in a wide pressure range and system and method for optical gas analysis/detection by means of such a device

Device for plasma generation in a wide pressure range comprising:

• a first plasma source (1), wherein the first plasma source (1) is arranged in a first discharge chamber (2) and is adapted to generate a first plasma (14) in a low-pressure range, wherein the low-pressure range extends in particular up to high vacuum, i.e. for example up to 10−8 Torr;
• a second plasma source (3), wherein the second plasma source (3) is arranged in a second discharge chamber (4) and is adapted to generate a second plasma (15) in a high-pressure range, wherein the high-pressure range extends in particular to above normal pressure, i.e. for example to 1500 Torr,
• a first coupling element (S), in particular having a flange, for coupling the device to a system, wherein the coupling element (5) is designed to lead gas out of the system;
• a second coupling element (6) for coupling the device to an optical sensor, such as a photodiode or spectrometer, for optical gas analysis or gas detection,
• wherein the first discharge chamber (2) has a first optical connection (L1) having at least one optical lens (7, 8) to the second coupling element (6), and the second discharge chamber (4) has a second optical connection (L2) having at least one optical lens (8) to the second coupling element (6).