Cooling plate and plasma processing chamber including the same

A cooling plate configured to cool a window configured to seal a plasma processing space at an upper portion of the plasma processing space, the cooling plate comprising:

• a body having a ring shape covering a part of an edge of the window;
• an inlet through which a gas is introduced into the body;
• and
• an outlet through which the gas is discharged from the body to the window,
• wherein a bottom surface of the body includes a vertical wall surface, a flat bottom surface, and a curved surface,
• wherein the flat bottom surface is disposed between the vertical wall surface and the curved surface,
• wherein the inlet is connected to a portion of the flat bottom surface, and
• wherein the outlet is connected to an end portion of the curved surface.

A plasma processing chamber comprising:

• a housing of which an upper portion is open, the housing providing a plasma processing space;
• an upper module provided to cover the upper portion of the housing;
• a support unit provided in the housing, and configured to support a substrate;
• and
• a shower head unit provided in the housing, and configured to supply a process gas for processing the substrate into the housing,
• wherein the upper module comprises:
• a window configured to seal the plasma processing space and the upper portion;
• a cooling plate configured to cool the window;
• and
• an antenna member located at an upper portion of the cooling plate and configured to generate plasma in the plasma processing space,
• wherein the cooling plate comprises an inner cooling plate and an outer cooling plate;
• wherein the inner cooling plate comprises:
• an inner body having a circular plate shape covering a part of a center region of the window;
• a first inlet through which a gas is introduced into the inner body;
• and
• a first outlet through which the gas is discharged from the inner body,
• wherein a first bottom surface of the inner body includes a first flat bottom surface at a first level, a second flat bottom surface at a second level lower than the first level, and a first curved surface,
• wherein the first flat bottom surface is disposed between the first curved surface and the second flat bottom surface,
• wherein the first inlet is connected to a first portion of the first curved surface, and
• wherein the first outlet is connected to a second portion of the first curved surface, and
• wherein the outer cooling plate comprises:
• an outer body having a ring shape covering a part of an edge of the window;
• a second inlet through which a gas is introduced into the outer body;
• and
• a second outlet through which the gas is discharged from the outer body to the window,
• wherein a bottom surface of the outer body includes a vertical wall surface, a flat bottom surface, and a second curved surface,
• wherein the flat bottom surface is disposed between the vertical wall surface and the second curved surface,
• wherein the second inlet is connected to a portion of the flat bottom surface, and
• wherein the second outlet is connected to an end portion of the second curved surface.