Charged Particle Beam System

A charged particle beam system that generates an observed image of a sample by irradiating the sample with a charged particle beam, the system comprising:

• a charged particle source that irradiates the sample with the charged particle beam;
• a first light irradiation unit that irradiates the sample with a first light;
• a detector that detects secondary charged particles generated by irradiating the sample with the charged particle beam and outputs a detection signal representing the intensity of the secondary charged particles;
• and
• a computer system that generates the observed image using the detection signal, wherein
• the computer system extracts from the observed image a first feature amount resulting from interference of the first light, diffraction of the first light, or standing waves of the first light caused by irradiating the sample with the first light, and
• the computer system acquires a second feature amount of the sample using the first feature amount.