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US 2024/0177943 A1Published application
Graphene nanowalls, manufacturing method thereof, electrode and supercapacitor
AssigneeIndustrial Technology Research Institute
InventorKun-Ping Huang
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Abstract
A graphene nanowalls (GNW), a manufacturing method thereof, an electrode and a supercapacitor are provided. The manufacturing method of a graphene nanowalls includes: placing a substrate in a microwave plasma apparatus; introducing a hydrocarbon gas and inert gas; and forming a graphene nanowalls on the substrate. The microwave plasma apparatus provides microwave frequency of less than 1 GHz.
Claims14
A manufacturing method of graphene nanowalls, comprising:
- placing a substrate in a microwave plasma apparatus;
- injecting a hydrocarbon gas;
- and
- forming graphene nanowalls on the substrate,
- wherein the microwave plasma apparatus provides a microwave frequency less than 1 GHz.
2 more elements
Dependencies are inferred from the claim text.