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US 2024/0177907 A1Published application
Carrier chuck and methods of forming and using thereof
AssigneeIntel Corporation
InventorsYosef KORNBLUTH, Whitney BRYKS, Ravindranadh ELURI, Aaditya Anand CANDADAI, Srinivas PIETAMBARAM
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Abstract
The present disclosure is directed to a carrier chuck having a base plate with a top surface, a plurality of first magnets positioned in a first region of the top surface, the plurality of first magnets configured to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing, wherein the first region corresponds to a region of the panel which comprises a magnetic material.
Claims20
A carrier chuck comprising:
- a base plate with a top surface;
- a plurality of first magnets positioned in a first region of the top surface, the plurality of first magnets configured to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing;
- and
- wherein the first region corresponds to a region of the panel which comprises a magnetic material.
1 more element
A method comprising:
- providing a base plate with a top surface;
- and
- providing a plurality of first magnets in a first region of the top surface to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing, wherein the first region corresponds to a region of the panel which comprises a magnetic material.
A method comprising:
- providing a panel;
- providing a carrier chuck, the carrier chuck comprising a base plate with a top surface, a plurality of first magnets positioned in a first region of the top surface, the plurality of first magnets configured to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing, wherein the first region corresponds to a region of the panel which comprises a magnetic material;
- positioning the panel over the carrier chuck to align at least a part of the region of the panel which comprises the magnetic material to the plurality of first magnets in the first region of the top surface;
- magnetically bonding the panel to the carrier chuck by an electromagnetic force to produce a magnetically bonded panel;
- and
- processing the magnetically bonded panel in one or more tools.
3 more elements
Dependencies are inferred from the claim text.