Determining equipment constant updates by machine learning
AssigneeApplied Materials, Inc.
InventorsThomas Ho Fai Li, Xiaoer Hu, Imaan Seraphine Islam Rahim
Life of this patent
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Abstract
A method includes providing, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system. The method further includes providing, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant. The method further includes retraining the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
Claims20
A method, comprising:
- providing, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system;
- providing, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant;
- and
- retraining the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
A non-transitory machine-readable storage medium, storing instructions which, when executed, cause a processing device to perform operations comprising:
- providing, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system;
- providing, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant;
- and
- retraining the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is to:
- provide, to a trained machine learning model configured to determine a recommended adjustment to an equipment constant of a substrate manufacturing system, first input data indicative of a state of the substrate manufacturing system;
- provide, to the trained machine learning model as second input data, an indication of a performed adjustment to the equipment constant;
- and
- retrain the trained machine learning model based on a difference between the recommended adjustment to the equipment constant and the performed adjustment to the equipment constant to generate a retrained machine learning model.
Dependencies are inferred from the claim text.