Chamber matching by equipment constant updates
AssigneeApplied Materials, Inc.
InventorsSidharth Bhatia, Roger Lindley, Upendra Ummethala, Thomas Li, Michael Howells, Steven Babayan, Mimi-Diemmy Dao
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AssigneeApplied Materials, Inc.
InventorsSidharth Bhatia, Roger Lindley, Upendra Ummethala, Thomas Li, Michael Howells, Steven Babayan, Mimi-Diemmy Dao
Estimating the term…
A method includes receiving, by a processing device, data indicative of performance of a plurality of process chambers. The method further includes providing the data indicative of performance of the plurality of process chambers to a model. The method further includes receiving as output from the model a first recommended equipment constant update associated with a first process chamber of the plurality of process chambers and a second recommended equipment constant update associated with a second process chamber of the plurality of process chambers. The method further includes updating a first equipment constant of the first process chamber and a second equipment constant of the second process chamber in view of the first recommended equipment constant update and the second recommended equipment constant update.
A method, comprising:
A system, comprising memory and a processing device coupled to the memory, wherein the processing device is to:
A non-transitory machine-readable storage medium storing instructions which, when executed, cause a processing device to perform operations comprising:
Dependencies are inferred from the claim text.