Pixel Scale Guided Mode Resonant Filter For Hyperspectral Sensing
AssigneeSony Semiconductor Solutions Corporation
InventorsTrevor O'Loughlin, Gui Gui, Frederick T Brady, Sungin Han, Victor A. Lenchenkov
Life of this patent
Estimating the term…
Abstract
Sensors and systems are provided. A sensor as disclosed includes a plurality of pixels disposed within an array. Each pixel is associated with a hyperspectral filter including a metamaterial and a metal grating capable of passing light of a particular wavelength range through to an image sensor. Systems include the use of an aluminum grating separated from a metamaterial including TiO2 and Si3N4 by a SiO2 coupling layer as a filter mounted on a substrate.
Claims20
A mode resonant filter for hyperspectral sensing, the filter comprising:
- a metal grating;
- a coupling layer;
- and
- a metamaterial.
A sensor comprising a mode resonant filter for hyperspectral sensing, the filter comprising:
- a metal grating;
- a coupling layer;
- and
- a metamaterial.
An imaging device, comprising:
- a pixel array unit, wherein the pixel array unit comprises:
- a plurality of pixels;
- and
- a plurality of mode resonant filters, wherein each filter includes:
- a metamaterial on a first layer of SiO2;
- a second layer of SiO2 on the metamaterial;
- and
- a metal grating on the second layer of SiO2.
Dependencies are inferred from the claim text.