US 2024/0176050 A1Published application

Liquid lens

AssigneeCorning Incorporated

InventorsChristian Daniel Gutleben, Andrew Wesley Johnson, Nicholas James Pfister

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Abstract

A liquid lens includes an intermediate layer having a tapered cavity. First and second outer layers are bonded to top and bottom sides, respectively of the intermediate layer. The liquid lens further includes a chamber that is formed, at least in part by the tapered cavity, and the first and second outer layers. A fluid interface is disposed between first and second fluids in the chamber. The liquid lens further includes first and second electrodes on a top side of the liquid lens. The second electrode is in electrical communication with the first fluid, whereby a position of the fluid interface is based at least in part on voltage applied between the first and second electrodes. The intermediate layer may optionally comprise silicon or glass.

Claims22

Dependent claims

A method of making a liquid lens, the method comprising:

etching a recess in a layer of silicon, wherein the recess includes a conical side surface formed in the layer of silicon and a base surface formed by a surface of a first layer of glass bonded to the layer of silicon, wherein the conical side surface defines first and second circular edges at first and second sides, respectively, of the layer of silicon, wherein the first layer of glass is bonded to the second side of the layer of silicon;
depositing a first conductive material onto at least a portion of the conical side surface and on at least a portion of the first side of the layer of silicon;
depositing a first dielectric material onto at least a portion of the first conductive material;
covering at least a portion of the first dielectric material on the conical side surface with an electrically insulating material that is configured to provide an electrowetting interface with a conductive liquid;
electrically connecting a first electrode to the first conductive material;
depositing a second dielectric material onto at least a portion of the first dielectric material on the first side of the layer of silicon;
depositing a second conductive material onto at least a portion of the second dielectric material;
electrically connecting a second electrode to the second conductive material;
depositing conductive and non-conductive liquids in the recess, an interface defined between the conductive and non-conductive liquids;
bonding a second layer of glass to the first side of the layer of silicon to close off the recess and form a cavity;
causing the second conductive material to be electrically connected to the conductive liquid in the cavity;
wherein the first and second electrodes are positioned on the first side of the layer of silicon.

9 more elements

A method of making a liquid lens having top-only electrical connections, the method comprising:

depositing a first conductive material onto a layer of material having a top side and a bottom side that is opposite the top side, and a recess, wherein the recess includes a conical side surface, wherein the conical side surface defines first and second circular edges forming top and bottom openings at the top and bottom sides, respectively, of the layer of material, whereby the first conductive material is deposited onto at least a portion of the conical side surface and at least a portion of the top side of the layer of material;
depositing a first dielectric material onto at least a portion of the first conductive material;
covering at least a portion of the first dielectric material on the conical side surface with an electrowetting material that is configured to provide an electrowetting interface with a conductive liquid;
electrically connecting a first electrode to the first conductive material;
depositing a second dielectric material onto at least a portion of the first dielectric material on the top side of the layer of material;
depositing a second conductive material onto at least a portion of the second dielectric material;
electrically connecting a second electrode to the second conductive material;
bonding a bottom layer of glass to the bottom side of the layer of material to close off the bottom opening of the recess;
depositing conductive and non-conductive liquids in the recess, an interface defined between the conductive and non-conductive liquids;
bonding a top layer of glass to the top side of the layer of material to close off the top opening of the recess to form a cavity, wherein at least a portion of the second conductive material is electrically connected to the cavity;
causing the second conductive material to be electrically connected to the conductive liquid in the cavity;
wherein the first and second electrodes are positioned on the top side of the layer of material, whereby a voltage can be applied to the first and second electrodes to influence a shape of the interface.

9 more elements

Dependencies are inferred from the claim text.