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US 2024/0175633 A1Published application
Setter for ceramic firing
AssigneeDenka Company Limited
InventorShuhei NONAKA
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Abstract
An aspect of the present disclosure provides a setter for ceramic firing, in which the setter is composed of a boron nitride sintered plate having a plurality of pores, a porosity is 8 vol % or higher, and a proportion of pores having a pore diameter of 0.2 to 0.9 μm is 76% to 95% of all pores, the pore diameter being measured with a mercury porosimeter.
Claims7
A setter for ceramic firing,
- wherein the setter is composed of a boron nitride sintered plate having a plurality of pores,
- a porosity is 8 vol % or higher, and
- a proportion of pores having a pore diameter of 0.2 to 0.9 μm is 76% to 95% of all pores, the pore diameter being measured with a mercury porosimeter.
Dependencies are inferred from the claim text.