Glass substrate chemical strengthening furnace apparatus
AssigneeSamsung Display Co., Ltd.
InventorHoi Kwan LEE
Life of this patent
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Abstract
A glass substrate chemical strengthening furnace apparatus includes a bottom portion and a side wall extending from an edge of the bottom portion, where the bottom portion and the side wall define a reaction space; and a plurality of heaters providing heat to the reaction space. The bottom portion includes an inclined portion located at a center and a collection portion disposed between the inclined portion and the side wall, the collection portion is in a groove shape in which an upper surface thereof is further recessed than the inclined portion, and the plurality of heaters includes a bottom heater disposed in the bottom portion or adjacent to the bottom portion.
Claims7
A glass substrate chemical strengthening furnace apparatus, comprising:
- a bottom portion and a side wall extending from an edge of the bottom portion, wherein the bottom portion and the side wall define a reaction space;
- a plurality of heaters which provides heat to the reaction space;
- and
- a plurality of ultrasonic generators which provides ultrasonic waves to the reaction space,
- wherein the plurality of heaters is disposed in the side wall or adjacent to the side wall, and not disposed in the bottom portion or at upper and lower portions of the bottom portion, and
- wherein the plurality of ultrasonic generators is disposed in the bottom portion or adjacent to the bottom portion.
A glass substrate chemical strengthening furnace apparatus, comprising:
- a bottom portion and a side wall extending from an edge of the bottom portion, wherein the bottom portion and the side wall define a reaction space;
- a plurality of heaters which provides heat to the reaction space;
- and
- a porous ceramic filter which adsorbs fine particles,
- wherein the plurality of heaters includes a side wall heater disposed in the side wall or adjacent to the side wall.
Dependencies are inferred from the claim text.