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US 2024/0174515 A1Published application
Systems of Getters for Microelectronics and Methods for Production Thereof
AssigneeMesoline Inc.
InventorsMarnix P. Rebergen, Thomas C.R. Russell, Serhii Mytnyk
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Abstract
Systems of getters for microelectronic devices and methods for micro-molding the getters are described. The getters comprising non-evaporable getter particles can be formed with a variety of nanoparticles and absorb various gas species to keep the microelectronic devices in desired working conditions. The micro-molded getters can be incorporated into various microelectronic devices.
Claims34
A microelectronic device or a microelectromechanical system (MEMS) device comprising:
- a first substrate;
- at least one functional element disposed on the first substrate;
- and
- a getter system disposed on a second substrate in proximity to the at least one functional element, the getter system comprising a plurality of getters, each getter comprising a plurality of nanoparticles;
- wherein each of the plurality of getters has an aspect ratio between 0.05 and 10;
- and
- wherein the getter system covers a surface area less than or equal to 90% of the second substrate.
4 more elements
A method for micro-molding getters, comprising:
- providing a substrate;
- applying a stamp to the substrate, wherein the stamp comprises a plurality of channels disposed adjacent to the substrate;
- dispensing a nanoparticle ink through the plurality of channels onto the substrate;
- curing the nanoparticle ink in the plurality of channels to form a plurality of getters comprising the nanoparticle ink on the substrate;
- removing the stamp;
- sintering the plurality of getters;
- and
- activating the plurality of getters.
5 more elements
Dependencies are inferred from the claim text.