# US 2024/0174459 A1 · Contactless Conveying Device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2024/0174459 A1 - Document ID: US20240174459A1 - Status: Published application - Kind: A1 - Application number: 18/552,076 - Filed: 2022-03-14 - Published: 2024-05-30 - Earliest claimed: 2021-03-25 - Assignees: Robert Bosch GmbH - Applicants: Robert Bosch GmbH - Inventors: Heike Raatz; Philipp Guth; Joachim Frangen - Web page: https://patentgrep.com/patent/US20240174459A1 ## CPC - B65G 54/02: electrostatic, electric, or magnetic - B65G 47/902: {provided with drive systems incorporating rotary and rectilinear movements} - H10P 72/3204: {using magnetic elements} - H10P 72/3302: {Mechanical parts of transfer devices} - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/3411: {involving loading and unloading of wafers} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A conveying device is configured to convey one or more payloads, in particular wafers, using transport bodies. The transport bodies are floatingly moved and positioned over a transport surface of a stator. The moving and positioning are preferably carried out with respect to all six degrees of freedom. The transport body has a movable boom or a movable manipulator or a movable robotic arm. At an end effector thereof, the payload is deposited or fastened. The payload can also be processed and/or checked. The processing and/or checking is carried out by an end effector of an additional transport body of the same conveying device. ## Claims ### Claim 1 A conveying device for conveying at least one payload, comprising: a stator defining a transport surface; at least one transport body configured to be floatingly moved and positioned over the transport surface of the stator, the at least one transport body including an end effector and a housing, the at least one payload associated with the at least one transport body; and one of a boom, a manipulator, or a robotic arm extending between the end effector and the housing of the at least one transport body, wherein the end effector is configured to be brought into operative connection with the at least one payload, wherein the boom, the manipulator, or the robotic arm enables and controls at least one first degree of freedom of movement of the end effector relative to the housing, and wherein at least one magnet array is movably accommodated in the housing of the at least one transport body, the at least one magnet array mechanically coupled to the boom, the manipulator, or robotic arm, and wherein the at least one magnet array is configured to be moved by being brought into magnetic interaction with the stator. ### Claim 2 (depends on 1) The conveying device according to claim 1, wherein the first degree of freedom of movement is a variable distance between the end effector and the housing along or parallel to the transport surface. ### Claim 3 (depends on 1) The conveying device according to claim 1, wherein the operative connection is a carrying, a handling, a positioning, a fixing, a processing, and/or a checking performable by the end effector on the at least one payload. ### Claim 4 (depends on 1) The conveying device according to claim 1, wherein the boom, the manipulator, or the robotic arm comprises a kinematic structure having at least two stages or sections. ### Claim 5 (depends on 4) The conveying device according to claim 4, wherein the at least two stages or sections of the kinematic structure are linearly shiftable or pivotable relative to one another. ### Claim 6 (depends on 1) The conveying device according to claim 1, further comprising: a plurality of process stations, each process station arranged laterally adjacent to the transport surface for processing the at least one payload. ### Claim 7 (depends on 6) The conveying device according to claim 6, wherein: each process station includes a process nest arranged having a lateral distance to the transport surface, and the lateral distance is bridgeable using the boom, the manipulator, or the robot arm in a corresponding extracted state. ### Claim 8 (depends on 1) The conveying device according to claim 1, wherein, in a corresponding contracted state of the boom, the manipulator, or the robotic arm, a center point of the at least one payload, or a portion of the at least one payload, or the at least one payload in its entirety, is arranged above the housing of the at least one transport body. ### Claim 9 (depends on 1) The conveying device according to claim 1, wherein the at least one magnet array is accommodated and attached in the housing of the transport body. ### Claim 10 (canceled) ### Claim 11 (depends on 1) The conveying device according to claim 1, wherein: the at least one magnet array is rotatably mounted in a bearing, a belt pulley is attached or coupled in a fixed manner to the at least one magnet array, and the belt pulley is mechanically coupled to the boom, the manipulator, or the robotic arm via a transmission belt. ### Claim 12 (depends on 1) The conveying device according to claim 1, wherein the at least one transport body includes two transport bodies each having symmetric end effectors configured to be moved toward one another at a lateral offset. ### Claim 13 (depends on 1) The conveying device according to claim 1, wherein the at least one transport body includes two transport bodies each having end effectors including two asymmetric fingers. ### Claim 14 (depends on 1) The conveying device according to claim 1, further comprising: an additional transport body having a housing which is or has a rotatable disc. ### Claim 15 (depends on 1) The conveying device according to claim 1, wherein: a transport chamber is formed over the transport surface, a gas or a gas mixture or a liquid, or a vacuum, or an ultra-high vacuum, or an aseptic area, or an ABC protected area is provided in the transport chamber, and the at least one transport body is accommodated in the transport chamber.