Substrate transferring apparatus and substrate transferring method

A substrate transfer apparatus comprising:

• a traveling rail comprising a straight section and a curved section;
• a raceway structure disposed on the traveling rail and configured to fix the traveling rail;
• a traveling device comprising a traveling wheel configured to travel on the traveling rail so as to transfer a substrate;
• a first sensor connected to the raceway structure and configured to recognize the traveling device;
• at least one second front sensor connected to the raceway structure and configured to recognize the traveling device;
• at least one second rear sensor connected to the raceway structure to be spaced apart from the at least one second front sensor in a traveling direction of the traveling device and configured to recognize the traveling device;
• and
• a third sensor connected to the traveling rail and configured to recognize the traveling device,
• wherein the at least one second front sensor, the at least one second rear sensor, and the third sensor are configured to move in the traveling direction.

A substrate transfer method comprising:

• recognizing, through a first sensor, a time when a traveling device in which a substrate is accommodated enters a traveling rail;
• moving a second sensor and a third sensor in a traveling direction of the traveling device when entry of the traveling device is recognized;
• and
• measuring, by the second sensor, a diameter of a traveling wheel of the traveling device while the second sensor is moving, and identifying, by the third sensor, identification information about the traveling device while the third sensor is moving.