Substrate attaching/detaching robot, substrate attaching/detaching method, and film formation apparatus
AssigneeResonac Corporation
InventorTakayuki MORI
Life of this patent
Estimating the term…
Abstract
Breakage of various parts during attaching or detaching of a substrate is inhibited. A substrate attaching/detaching robot includes a substrate holding member configured to hold a substrate, a robot arm configured to move the substrate holding member, and at least three line-shaped members connecting the substrate holding member and an end of the robot arm. The three line-shaped members are made of a shape-memory alloy. A temperature of the substrate holding member during attaching or detaching of the substrate onto or from a substrate holder configured to hold the substrate in a detachably attachable manner is in a range of a shape recovery temperature of the shape-memory alloy.
Claims4
A substrate attaching/detaching robot, comprising:
- a substrate holding member configured to hold a substrate;
- a robot arm configured to move the substrate holding member;
- and
- at least three line-shaped members connecting the substrate holding member and an end of the robot arm,
- wherein the three line-shaped members are made of a shape-memory alloy, and
- a temperature of the substrate holding member during attaching or detaching of the substrate onto or from a substrate holder configured to hold the substrate in a detachably attachable manner is in a range of a shape recovery temperature of the shape-memory alloy.
A substrate attaching/detaching method, comprising:
- connecting, as preparation, a substrate holding member configured to hold a substrate and an end of a robot arm configured to move the substrate holding member, using at least three line-shaped members made of a shape-memory alloy;
- setting, as preparation, a temperature of the substrate holding member during attaching or detaching of the substrate in a range of a shape recovery temperature of the shape-memory alloy;
- inserting the substrate holding member into an opening in the substrate to make the substrate holdable by the substrate holding member;
- and
- attaching or detaching the substrate onto or from a substrate holder configured to hold the substrate in a detachably attachable manner.
Dependencies are inferred from the claim text.