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US 2024/0170189 A1Published application
Distortion resistance film, pressure sensor, and layered body
AssigneeTDK Corporation
InventorsKohei NAWAOKA, Ken UNNO, Tetsuya SASAHARA, Masanori KOBAYASHI
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Abstract
A distortion resistance film, etc., which includes Cr, Al, and N and in which film separation can be prevented. A distortion resistance film including an alloy material including Cr, Al, N, and Si.
Claims8
A distortion resistance film comprising an alloy material containing Cr, Al, N, and Si.
Dependencies are inferred from the claim text.