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AssigneeSumitomo Electric Industries, Ltd.
InventorsTetsuya NAKANISHI, Manabu SHIOZAKI, Shigehiro NAGANO, Hajime ARAO
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An optical waveguide manufacturing method according to one embodiment is an optical waveguide manufacturing method by irradiating glass with femtosecond laser beam to form an optical waveguide. The optical waveguide manufacturing method includes a first process of irradiating the glass with the femtosecond laser beam having a pulse width of 300 (fs) or less and a repetition frequency of 700 (kHz) or less while relatively moving the glass and a focal position of the femtosecond laser beam and a second process of irradiating an increased refractive index portion with a femtosecond laser beam having a pulse width of 300 (fs) or less and a repetition frequency higher than 700 (kHz).
An optical waveguide manufacturing method irradiating glass with a femtosecond laser beam to form the optical waveguide, comprising:
An optical waveguide having a changed refractive index portion, which is a portion where a density of glass changes in a substrate configured with the glass having a uniform composition, and the changed refractive index portion is extended in the substrate,
An optical waveguide having a changed refractive index portion, which is a portion where a density of glass changes in a substrate configured with the glass having a uniform composition, and the changed refractive index portion is extended in the substrate,
An optical waveguide having a changed refractive index portion, which is a portion where a density of glass changes in a substrate configured with the glass having a uniform composition, and the changed refractive index portion is extended in the substrate,
Dependencies are inferred from the claim text.