Method for depositing a layer optical element, and optical assembly for the duv wavelength range

A method for depositing at least one layer of a coating which is reflective or anti-reflective to radiation in the deep ultraviolet (DUV) wavelength range onto a surface to be coated of a substrate for an optical element for the DUV wavelength range, comprising:

• transferring a coating material into the gas phase in a coating source, wherein the coating material in the coating source is transferred into the gas phase by thermal evaporation,
• moving the substrate relative to the coating source along a predetermined movement path, wherein the substrate additionally rotates around a spin axis during the movement along the movement path and wherein a covering element is arranged between the coating source and the surface to be coated, which covering element covers the surface to be coated at least partially during the movement of the substrate along the movement path,
• varying a rotation speed of the spin axis of the substrate during the movement of the substrate along the movement path, wherein the coating material, which is deposited on the surface to be coated, is an oxide coating material or a fluoride coating material.