Method of manufacturing hexagonal boron nitride multilayer
AssigneeSookmyung Women's University Industry-Academic Cooperation Foundation
InventorsSoo Min KIM, Hayoung KO
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Abstract
Provided is a method of manufacturing a hexagonal boron nitride multilayer according to an embodiment of the inventive concept, which includes providing a catalyst substrate including iron into a tube, using a heater to raise an internal temperature of the tube to 1400° C. or higher, and providing a boron nitride precursor into the tube to form a hexagonal boron nitride multilayer on the catalyst substrate.
Claims20
A method of manufacturing a hexagonal boron nitride multilayer, the method comprising:
- providing a catalyst substrate including iron into a tube;
- using a heater to raise an internal temperature of the tube to 1400° C. or higher;
- and
- providing a boron nitride precursor into the tube to form a hexagonal boron nitride multilayer on the catalyst substrate.
A method of manufacturing a hexagonal boron nitride multilayer, the method comprising:
- providing a catalyst substrate including iron into a tube;
- using a heater to raise an internal temperature of the tube to 1400° C. or higher;
- providing a boron nitride precursor into the tube to melt the catalyst substrate;
- and
- lowering the internal temperature of the tube to solidify the molten catalyst substrate.
A method of driving a deposition apparatus, the method comprising:
- providing a catalyst substrate including iron into a tube;
- using a heater to raise an internal temperature of the tube to 1400° C. or higher;
- and
- providing a boron nitride precursor into the tube,
- wherein the tube includes aluminum oxide.
Dependencies are inferred from the claim text.