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US 2024/0162883 A1Published application
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorHaruki KYOUYA
Life of this patent
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Abstract
An acoustic wave device in which a piezoelectric film is directly or indirectly laminated on a support substrate, a first Interdigital Transducer (IDT) electrode, on a first main surface of the piezoelectric film, and a second IDT electrode on a second main surface, are provided. One of the first IDT electrode and the second IDT electrode is made of an epitaxial film and another of the first IDT electrode and the second IDT electrode is made of a non-epitaxial film.
Claims12
An acoustic wave device comprising:
- a support substrate;
- a piezoelectric film including a first main surface and a second main surface, the first main surface and the second main surface being opposed to each other, and is directly or indirectly laminated on the support substrate from a side including the second main surface;
- and
- a first Interdigital Transducer (IDT) electrode and a second IDT electrode on the first main surface and the second main surface of the piezoelectric film respectively;
- wherein
- one of the first IDT electrode and the second IDT electrode is made of an epitaxial film and another of the first IDT electrode and the second IDT electrode is made of a non-epitaxial film.
3 more elements
Dependencies are inferred from the claim text.