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US 2024/0162881 A1Published application
Acoustic wave device, filter, and multiplexer
AssigneeTaiyo Yuden Co., Ltd.
InventorsSatoshi IMASU, Ryohei KOMIYAMA, Shinji YAMAMOTO
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Abstract
An acoustic wave device includes a piezoelectric layer, and at least one pair of comb-shaped electrodes provided on the piezoelectric layer, each of the comb-shaped electrodes including electrode fingers each having a first layer and a second layer provided on the first layer, the first layer being a titanium nitride layer with a thickness greater than 50 nm, the second layer being a metal layer.
Claims11
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- at least one pair of comb-shaped electrodes provided on the piezoelectric layer, each of the comb-shaped electrodes including electrode fingers each having a first layer and a second layer provided on the first layer, the first layer being a titanium nitride layer with a thickness greater than 50 nm, the second layer being a metal layer.
Dependencies are inferred from the claim text.